A thin film protected capacitor structure having a thin film capacitor and a protection device is provided on an integrated circuit wafer. The wafer has a low resistivity substrate of a first type disposed under an epitaxial layer of a second type different from the first type. The structure...http://www.google.com.hk/patents/US5706163?utm_source=gb-gplus-share專利 US5706163 - ESD-protected thin film capacitor structures
