A torsional cantilever is microfabricated for reduced size to increase its resonance frequency, increase its scanning speed, and permit fabrication of large numbers in an array to provide parallel scanning. The cantilever may incorporate a tip for highly sensitive force detection. The device preferably...http://www.google.com.hk/patents/US6073484?utm_source=gb-gplus-share專利 US6073484 - Microfabricated torsional cantilevers for sensitive force detection
