An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member....http://www.google.com.hk/patents/US5060039?utm_source=gb-gplus-share專利 US5060039 - Permanent magnet force rebalance micro accelerometer
