A method of fabricating a digital micromirror device (DMD) (10) spatial light modulator (SLM) with a hardened superstructure hinge (16). The invention comprises strengthening a hinge layer material (36) by ion implantation before etching the hinge layer material (36) to form the hinge (16), but could...http://www.google.com.hk/patents/US5504614?utm_source=gb-gplus-share專利 US5504614 - Method for fabricating a DMD spatial light modulator with a hardened hinge
