The present invention relates to a method for manufacturing a MEMS device, including the actions of: providing a substrate having a back and front surface essentially in parallel with each other, defining in said substrate at least one hidden support by removing material from said substrate, connecting...http://www.google.com.hk/patents/US7372617?utm_source=gb-gplus-share專利 US7372617 - Hidden hinge MEMS device
