An apparatus and method for generating a trajectory used in precision lithography, includes receiving first input parameters for a first trajectory and second input parameters for a second trajectory, converting the first input parameters of the first trajectory into a first derivative-jerk and the second...http://www.google.com.hk/patents/US20040236453?utm_source=gb-gplus-share專利 US20040236453 - Method and apparatus for combining and generating trajectories
