A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is...http://www.google.com.hk/patents/USRE33947?utm_source=gb-gplus-share專利 USRE33947 - Laser scribing method
