An aqueous cleaning composition comprising an alkanolamine, a tetraalkylammonium hydroxide, nonmetallic fluoride salt, a corrosion inhibitor, e.g. ascorbic acid or its derivatives alone or in combination, balance water. Such cleaning compositions are effective to remove residues from plasma process generated...http://www.google.com.hk/patents/US6627587?utm_source=gb-gplus-share專利 US6627587 - Cleaning compositions
