A device comprising an array of free metal ribbons that are coupled to a substrate through ceramic support structures is disclosed. The device is preferably an optical MEM device, wherein a first set of free metal ribbons are configured to move relative to a second set of alternating free metal ribbons...http://www.google.com.hk/patents/US7046420?utm_source=gb-gplus-share專利 US7046420 - MEM micro-structures and methods of making the same
