A micromechanical component has a substrate, a first intermediate layer which is situated thereupon, and a first layer which is situated thereupon and is structured down to the first intermediate layer. A second intermediate layer is situated above the first layer. A second layer is situated on the former,...http://www.google.com.hk/patents/US7919346?utm_source=gb-gplus-share專利 US7919346 - Micromechanical component and manufacturing method
